Picture of Laser excimer EX10A
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Linards Skuja
2nd Responsible:
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Description

Excimer laser system EX10A/500

Available waveleghts: 157 nm, 193 nm, 248 nm

Beam characteristics:

Wavelenght: 157 nm

  • energy: 2.5 mJ
  • power: 0.8 W

Wavelenght: 193 nm

  • energy: 18.5 mJ
  • power: 14 W

Wavelenght: 248 nm

  • energy: 26 mJ
  • power: 11 W
Details
Tool name:
Laser excimer EX10A
Area/room:
313
Category:
Lasers
Manufacturer:
Gam Laser, Inc.
Model:
EX10A
Tool rate:
A
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Tool Modes
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