Picture of Profiler Zygo 7100
Current status:
AVAILABLE
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1st Responsible:
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Non contact films thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review and etc.

  • Measurement technique: 3D optical interferometer
  • Field of view: from 0.5 to 2 mm
  • Objectives: 5x, 10x and 50x
  • Optical resolution: ≤ 4µm
  • x/y scan rate: ≤ 26µm/sek
  • Sample stage: Motorized 150 mm x/y travel; Manual ±6° tip/tilt
  • Sample maximum size: 89 x 203 x 203 mm
  • Vertical resolution: 0.1nm
  • Vertical scan range: 150µm
  • Focus: Motorized manual and auto focus
  • On-screen live display: 23" TFT monitor with live display
  • Scanning and processing software: ZYGO MetroPro
Tool name:
Profiler Zygo 7100
Area/room:
CLR - 131
Category:
Characterization
Manufacturer:
Zygo
Model:
Newview 7100
Tool rate:
C
Max booking time, day:
8 hours
Max booking time, night:
hours
No. of future bookings:
3

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