Picture of Pulsed Laser Deposition
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Pulsed Laser Deposition (PLD) systems typically use a focused pulsed excimer laser to vaporize a small amount of a solid target material in a vacuum chamber in order to produce a thin film with the same chemical composition as the original target material.

The PLD process enables the deposition of many complex materials at different substrate temperatures and over a wide range of background gas compositions and pressures.

Tool name:
Pulsed Laser Deposition
Area/room:
CLR - 110
Category:
Thin film deposition
Manufacturer:
Twente Solid State Technology
Model:
1
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
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