Picture of Thermal evaporator in GloveBox
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WARNING
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System is dedicated to thermal evaporation of metals and organic compounds.

It has four LTE and three metal evaporators.

Substrates are rotating during the process.

Mask exchange can be performed without breaking the vacuum.

Substrates and compounds can be loaded in the vacuum chamber through the glovebox.

Tool name:
Thermal evaporator in GloveBox
Area/room:
CLR - 110
Category:
Thin film deposition
Manufacturer:
Moorfield Nanotechnology/Jacomex
Model:
MiniLab LT090A-MX/ GP (Concept)-T
Tool rate:
A

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