Picture of Horizontal CVD Reactor
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Chemical vapour deposition reactor for nanomaterials synthesis at atmospheric or low pressure, including gradient tube furnace with three independently controllable zones, inert and reactive gas delivery system (2 – 200 sccm), and rotary vane pump (> 0.1 Torr).

Tool name:
Horizontal CVD Reactor
Area/room:
213
Category:
Thermal processes
Manufacturer:
Carbolite
Model:
TG3 12/60/600
Tool rate:
A

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