Measurement Technique:

Stylus profilometry (contact measurement)

Measurement Capability:

Two-dimensional surface profile measurements.

Three-dimensional measurement/analyses

Stitching Capability

Automated Measurement Collection

Sample Viewing:

Digital magnification, 0.275 to 2.2 mm vertical FOV

Stylus Force:

1 to 15 mg with LIS 3 sensor;

Stylus Options:

Stylus radius 12,5 μm

Sample Stage X/Y:

Motorized 150 mm (6 in.) X/Y, manual leveling;

Stage:

Motorized, continuous 360 degrees