Picture of Heidelberg DWL 66+ Laser Lithography System
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The DWL 66+ offers exceptional flexibility, advanced grayscale performance, and industry-leading resolution among direct-write laser systems.

Engineered as a highly adaptable platform, the DWL 66+ is ideal for research and rapid prototyping across a wide range of fields, including MEMS, microelectronics, microfluidics, sensors, optics, photonics, photovoltaics, materials science, and quantum technologies—essentially any application requiring precise microstructure fabrication.

Tool name:
Heidelberg DWL 66+ Laser Lithography System
Area/room:
CLR - 123
Category:
Lithography
Manufacturer:
Heidelberg Instruments
Model:
DWL 66+
Tool rate:
A

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