Picture of SEM Phenom Pro
Current status:
DOWN
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Responsibles
1st Responsible:
Karlis Kundzins
2nd Responsible:
Einars Sprugis
Files
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Description
  • Light optical magnification: 20 - 135x
  • Electron optical magnification range: 80 - 130,000x
  • Resolution: ≤ 10 nm 
  • Digital zoom: Max. 12x
  • Light optical navigation camera: Color
  • Acceleration voltages:
    • Default: 5 kV, 10 kV
    • Advanced mode: adjustable range between 4,8 kV and 10 kV imaging mode
  • Vacuum modes:
    • Standard mode
    • Charge reduction mode
  • Detector:
    • BSD
    • EDS (optional)
  • Sample size: Up to 32 mm (Ø)
  • Sample height: Up to 100 mm 
Details
Tool name:
SEM Phenom Pro
Area/room:
517
Category:
Electron/Ion microscopy
Manufacturer:
Phenom-World
Model:
Phenom Pro
Tool rate:
A
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Tool Modes
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