Non contact films thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review and etc.
- Measurement technique: 3D optical interferometer
- Field of view: from 0.5 to 2 mm
- Objectives: 5x, 10x and 50x
- Optical resolution: ≤ 4µm
- x/y scan rate: ≤ 26µm/sek
- Sample stage: Motorized 150 mm x/y travel; Manual ±6° tip/tilt
- Sample maximum size: 89 x 203 x 203 mm
- Vertical resolution: 0.1nm
- Vertical scan range: 150µm
- Focus: Motorized manual and auto focus
- On-screen live display: 23" TFT monitor with live display
- Scanning and processing software: ZYGO MetroPro