Spin coater is tool for application of a thin film (a few nm to a few um) evenly across the surface of a substrate by coating (casting) a solution of the desired material in a solvent (an "ink") while it is rotating.

• Up to 150 mm substrates (with alignment tool for wafers)
• Up to 12 kRPM speeds (up to 13 kRPM acceleration) - actual acceleration/max speeds are sample size dependent
• Chucks for:
  • samples up to 15mm
  • 5 - 25 mm
  • 25 x 75 mm slide adapter
  • 50 - 150 mm chuck
• Dynamic dispensing system: available for AZ1518, AZ1505 and LOR resists
• Manual edge bead removal system
• Multi-step program building using Bluetooth connection and dedicated software (coming soon)