A fully PC controlled SEM with Schottky field emission cathode in combination with gallium focused ion beam (FIB) column and with gas injection system (GIS):

• Accelerating voltage 200 V to 30 kV
• Probe current 2 pA to 200 nA
• Resolution in high vacuum mode 1.2 nm at 30 kV, 4.5 nm at 1 kV
• Resolution BSE: 2 nm at 30 kV
• Maximum field of view 6 mm at WD 9 mm, 17 mm at WD 30 mm

 Electron optics working modes:

• resolution: high-resolution mode
• depth: sets the column up in a mode that enhances depth of focus
• field: optimizes the column to provide a large non-distorted field of view
• gallium liquid metal ion source 0.5 kV to 30 kV
• probe current 1 pA to 40 nA
• SEM-FIB angle: 55°

 Chamber Vacuum:

• high vacuum mode: < 9×10-3 Pa
• low vacuum mode: 7 – 500 Pa

 Other:

• micromanipulator for TEM lamella preparation
• EDX Oxford X-Max 50 mm2 detector, AZtec software