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Electron optics

• Elstar extreme high-resolution field emission SEM column with:

– Magnetic immersion objective lens

– UC+ monochromator technology

• Integrated Fast Beam Blanker

Electron beam resolution:

– 0.6 nm at 30 kV STEM

– 0.7 nm at 1 kV

– 1.0 nm at 500 V (ICD)

Electron beam parameter space

• Electron beam current range: 0.8 pA to 100 nA

• Accelerating voltage range: 350 V – 30 kV

Ion optics

Phoenix Ion Column with superior high-current and low-voltage


• Ion beam current range: 1 pA – 65 nA

• Accelerating voltage range: 500 V – 30 kV

Ion beam resolution at coincident point

• 4.0 nm at 30 kV using preferred statistical method

• 2.5 nm at 30 kV using selective edge method


• Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)

• Elstar in-column SE/BSE detector (ICD)

• Elstar in-column BSE detector (MD)

• Everhart-Thornley SE detector (ETD)

• IR camera for viewing sample/column

• High-performance in-chamber electron and ion detector (ICE)

for secondary ions (SI) and electrons (SE)

• Sample navigation with in-chamber Thermo Scientific NavCam Camera

• Retractable, low-voltage, high-contrast, directional, solid-state

backscatter electron detector (DBS)

• Retractable STEM 3+ detector with BF/ DF/ HAADF


• Integrated beam current measurement

Analysis: EDS and EBSD

GIS (Gas Injection System) Solutions:

– Platinum deposition

– Carbon deposition

 Thermo Scientific™ EasyLift™ NanoManipulator

Tool name:
SEM Helios
Electron/Ion microscopy
Thermo Fisher Scientific
Helios 5 UX
Tool rate:


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