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MOCVD, or metal organic chemical vapor deposition, is the key tool used for LED production. MOCVD is also used in III-V applications, such as RF and optoelectronics. It is sometimes called metal organic vapor phase epitaxy (MOVPE).

Tool name:
MOCVD
Area/room:
132
Category:
Other processes
Manufacturer:
Aixtron SE (Germany)
Model:
AIX-200RF
Tool rate:
A

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